ProTemp Products, Inc. is a privately owned U.S. corporation headquartered in Santa Clara, Ca. that has been serving the semiconductor and solar industries since 1973.

We take our ability to be flexible seriously as it has proven to be the best way to serve the ever-changing requirements of our industry. To better support our customers in SE Asia ProTemp opened a sales, service and manufacturing facility in Wuxi, China in 2005.

Throughout the world, microelectronics and solar cell manufacturers have come to rely on ProTemp Products for state-of-the-art equipment, reliable delivery, total support and competitive pricing.

Diffusion Furnace Products and Accessories by ProTemp

SolaReactorâ„¢ Solar Cell Diffusion Furnaces


Designed specifically for the solar industry, the SolaReactorâ„¢ deposits a dual refractive index PECVD AR film and low sheet resistance POCl3 deposition to produce highly efficient solar cells.
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External Torch Assembly


The ProTemp External Torch Assembly is a complete and safe system for producing wet O2 oxidation without adversely affecting the furnace temperature profile or the leading wafers in the boat.
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Coil Sag Detector System


The ProTemp Coil Sag Detector System protects expensive Silicon Carbide process tubes from being damaged or destroyed when a heating element coil sags and touches the tube.
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Flammable Gas Burn-off System


The ProTemp Hydrogen Burn-Off System can be utilized with virtually any gas control system/ diffusion furnace combination, providing an extremely high degree of reliability and operator/equipment safety.
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Diffusion Furnace Reconditioning and Upgrading

ProTemp Products has in-house facilities for refurbishing or reconfiguring a customer’s diffusion furnace system.
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Diffusion Furnace Heating Elements


ProTemp’s Saturn™ Direct Replacement Heating Elements are available in a wide range of sizes with inside diameters ranging from 4 to 24 inches (101 to 610mm).
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Mass Flow Controller (MFC) Service

For our increasing China and the Pacific Rim customers we have established service facilities in Wuxi.
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ProTemp Product Divisions

ProTemp is a worldwide supplier for state-of-the-art equipment used in the manufacture of solar cells. Our SolaReactorâ„¢ PECVD and POCl3 systems are widely used for small R&D to large production run requirements.

ProTemp Products Furnace Division has supplied over 250 systems worldwide configured as Atmospheric, LPCVD, PECVD, High Temperature and Special Applications in both horizontal and vertical configurations.

ProTemp Products Solar Equipment Division supplies in-line PECVD Anti-Reflective coating and POCl3 deposition systems used worldwide in the solar cell industry.

ProTemp Products Refurbished Furnace Division has in-house facilities for refurbishing or reconfiguring a customer’s diffusion furnace or PECVD system. This includes upgrading to larger wafer processing capability, process reconfiguration, adding automatic loading systems and upgrading controls.

ProTemp Products Element Division is a major supplier of heating elements to end-users worldwide as well as many of the furnace manufacturers and rebuilders.

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ProTemp Global Support

Factory trained service engineers are located in Santa Clara & Los Angeles, CA (USA) providing 24/7 support of equipment.

Start-Up Assistance, Maintenance Contracts and Process Support programs are available.

Specific production sensitive replacement parts are stocked at our Santa Clara, CA,  facilities and at certain local distributor sites.

Global Support Office Locations

ProTemp References

ProTemp has a long list of commercial and university references.

We take pride in working closely with every customer and have established a strong reputation for extraordinary support, both technical and process, on our equipment.

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