SolaReactorâ„¢ Solar Cell Diffusion Furnaces

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Designed specifically for the solar industry, the SolaReactorâ„¢ deposits a dual refractive index PECVD AR film and low sheet resistance POCl3 deposition to produce highly efficient solar cells.
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External Torch Assembly

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The ProTemp External Torch Assembly is a complete and safe system for producing wet O2 oxidation without adversely affecting the furnace temperature profile or the leading wafers in the boat.
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Coil Sag Detector System

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The ProTemp Coil Sag Detector System protects expensive Silicon Carbide process tubes from being damaged or destroyed when a heating element coil sags and touches the tube.
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Flammable Gas Burn-off System

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The ProTemp Hydrogen Burn-Off System can be utilized with virtually any gas control system/ diffusion furnace combination, providing an extremely high degree of reliability and operator/equipment safety.
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Diffusion Furnace Reconditioning and Upgrading

ProTemp Products has in-house facilities for refurbishing or reconfiguring a customer’s diffusion furnace system.
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Diffusion Furnace Heating Elements

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ProTemp’s Saturn™ Direct Replacement Heating Elements are available in a wide range of sizes with inside diameters ranging from 4 to 24 inches (101 to 610mm).
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Mass Flow Controller (MFC) Service

For our increasing China and the Pacific Rim customers we have established service facilities in Wuxi.
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PROTEMP PRODUCT DIVISIONS

ProTemp is a worldwide supplier for state-of-the-art equipment used in the manufacture of solar cells. Our SolaReactorâ„¢ PECVD and POCl3 systems are widely used for small R&D to large production run requirements.

ProTemp Products Furnace Division has supplied over 250 systems worldwide configured as Atmospheric, LPCVD, PECVD, High Temperature and Special Applications in both horizontal and vertical configurations.

ProTemp Products Solar Equipment Division supplies in-line PECVD Anti-Reflective coating and POCl3 deposition systems used worldwide in the solar cell industry.

ProTemp Products Refurbished Furnace Division has in-house facilities for refurbishing or reconfiguring a customer’s diffusion furnace or PECVD system. This includes upgrading to larger wafer processing capability, process reconfiguration, adding automatic loading systems and upgrading controls.

ProTemp Products Element Division is a major supplier of heating elements to end-users worldwide as well as many of the furnace manufacturers and rebuilders.

ProTemp (Wuxi) Electronic Equipment Co., Ltd. is a fully staffed sales and service facility that offers one of the most complete service and calibration facilities for all brands of mass flow controllers in China, all our work is performed using primary standards with traceable accuracy to NISST/ANSI.

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