ProTemp’s Saturn™ line of Direct Replacement Heating Elements for semiconductor and solar cell diffusion furnaces are available in a wide range of sizes with inside diameters ranging from 4 to 24 inches (101 to 610mm).

Our diffusion furnace heating elements are available for horizontal and vertical furnace units.

For replacement furnace heating elements, the physical and electrical configuration of the Siriusâ„¢ heating elements are the same as the OEM furnace element for easy installation.

If you need a diffusion furnace heating element for a custom application ProTemp offers custom designed elements for your specific applications.

The Siriusâ„¢ Direct Replacement Heating Elements offer many advantages including:
– Lower Initial Cost
– Reduced Cost of Operation Over the Life of the Element
– Reduced Power Consumption
– Reduced Impact on HVAC/Chilled Water
– Improved Element Design
– Higher Continuous Operating Temperature
– Increased Wafer Processing in Many Applications
– Longer Element Lifetime
– Extended Warranty

Learn more about our diffusion furnace heating elements.

If you have questions or would like to talk with us about replacement heating elements, email us at sales@protempproducts.com or call us at 1-800-855-8222 x102