External Torch Assembly

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The ProTemp External Torch Assembly is a complete and safe system for producing wet O2 oxidation without adversely affecting the furnace temperature profile or the leading wafers in the boat.
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Coil Sag Detector System

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The ProTemp Coil Sag Detector System protects expensive Silicon Carbide process tubes from being damaged or destroyed when a heating element coil sags and touches the tube.
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Flammable Gas Burn-off System

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The ProTemp Hydrogen Burn-Off System can be utilized with virtually any gas control system/ diffusion furnace combination, providing an extremely high degree of reliability and operator/equipment safety.
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Diffusion Furnace Heating Elements

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ProTemp’s Saturn™ Direct Replacement Heating Elements are available in a wide range of sizes with inside diameters ranging from 4 to 24 inches (101 to 610mm).
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