Diffusion Furnaces

Semiconductor Diffusion Furnaces

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SIRIUSâ„¢ semiconductor diffusion systems are fully equipped, compact and can be configured to your specific requirements
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Siriusâ„¢ Junior University/R&D/Pilot Production Furnaces

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ProTemp Sirius Junior furnace offers a wide range of Atmospheric, LPCVD and PECVD process capabilities for wafer sizes up to 450mm diameter.
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SolaReactorâ„¢ Solar Cell Diffusion Furnaces

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Designed specifically for the solar industry, the SolaReactorâ„¢ deposits a dual refractive index PECVD AR film and low sheet resistance POCl3 deposition to produce highly efficient solar cells.
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