Diffusion Furnace Accessories

External Torch Assembly

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The ProTemp External Torch Assembly is a complete and safe system for producing wet O2 oxidation without adversely affecting the furnace temperature profile or the leading wafers in the boat.
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Temptronics Liquid Source Temperature Controller

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The ProTemp TEMPTRONICSâ„¢ 2900LS Temperature Control System provides accurate and stable temperature control of liquid source chemicals.
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Automatic Loader System

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The ProTemp Automatic Loader System is available in Pusher/Puller, Twin-rod Cantilever and Paddle Cantilever models.
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Coil Sag Detector System

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The ProTemp Coil Sag Detector System protects expensive Silicon Carbide process tubes from being damaged or destroyed when a heating element coil sags and touches the tube.
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Flammable Gas Burn-off System

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The ProTemp Hydrogen Burn-Off System can be utilized with virtually any gas control system/ diffusion furnace combination, providing an extremely high degree of reliability and operator/equipment safety.
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T/C Track Thermocouple System

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The ProTemp T/C Track System eliminates the problem of cold joints where the thermocouple wires connect at a junction block.
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