Project Description

System Overview

  • Offered in 2-Stack, 3-stack or 4-stack configurations
  • Custom configurations available
  • May be configured for atmospheric, LPCVD or PECVD processes
  • Heating elements with >6” >8”, or >12” dia. wafer processing capability
  • 18” (46cm) thermal flatzone, temperature stability full length of flatzone = + 10C
  • Inline load station with cantilever, soft-landing or pusher/puller loading systems
  • Soft-Start Mass Flow Controlled gas systems
  • Per tube digital process and temperature controllers
  • HOST computer system
  • Start-Up Assistance, system functional qualification and training available
Photo of Sirius Jr Furnace
Ideally suited for university, R&D and low production requirements

Facilities Specifications

Electrical Requirements          220 – 480 VAC, 3 Phase, 50/60HZ
Load Station                          73” (185.4cm) W x 76” (193cm) H x 27” (68.5cm) D
Furnace and Scavenger           58” (147.3cm) W x76” (193cm) H x27” (68.5cm) D
Gas Cabinet                           23.5” (60cm) W x76” (193cm) H x 27” (68.5cm) D

Siriusâ„¢ Junior Furnace System Advantages

Economical – A SiriusÔ Junior furnace with capability for future process capability expansion may be ordered for less than $100,000.

Versatility – ProTemp SiriusÔ Junior furnace offers a wide range of Atmospheric, LPCVD and PECVD process capabilities for wafer sizes up to 450mm diameter. Our furnace systems may be configured to have any or all of these capabilities in the same frame. The system may be configured with two, three or four tube levels.

Minimal Floor Space – Our Junior furnace and gas cabinet occupies less than 13 ft2 of floor space, the load station occupies less than 14 ft2.

Design Flexibility – The SiriusÔ Junior furnace may be ordered with one or more tube levels populated, these tube levels may be populated at a later date in the fab. This is a significant advantage over table top style furnaces.

Automatic Loader Station – The furnace may be ordered without a load station (manual loading) and the load station with auto-loaders (cantilever loaders, soft-landing or push/puller systems) added at a later date.

Heating Elements – ProTemp’s heating elements are guaranteed up to 14000C and have one of the longest warranties in the industry.

Gas Systems – ProTemp offers both standard and custom designed gas systems to meet our customer’s specific processing needs.

Process Sequence Controller – Our furnace design uses an independent process sequence controller per tube level allowing ease of expansion (to de-populated tube levels) and eliminating system shut-down of multiple tubes. Our controller also has a life time warranty.

HOST Computer – Offers many features including: Eight programmable levels of system security, Plotting & Trending, Three Year Warranty, Download Run Parameters, Viewing Recipe Parameters, Production Management Interface, Remote Operation & Modem Interface, Recipe Storage, Changes & Editing and a site license with free life time software upgrades. The HOST computer may be ordered with the system or at a later date.

Talk With Us About Diffusion Furnaces

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